Applied Materials, Inc.
3D dram structure with high mobility channel
Last updated:
Abstract:
Memory devices are described. The memory devices include a plurality of bit lines extending through a stack of alternating memory layers and dielectric layers. Each of the memory layers comprises a single crystalline-like silicon layer and includes a first word line, a second word line, a first capacitor, and a second capacitor. Methods of forming stacked memory devices are also described.
Status:
Grant
Type:
Utility
Filling date:
3 Feb 2020
Issue date:
5 Apr 2022