Applied Materials, Inc.
INFINITE ROTATION OF VACUUM ROBOT LINKAGE THROUGH TIMING BELT WITH ISOLATED ENVIRONMENT

Abstract:

Disclosed herein are a vacuum robot, vacuum robot linkages that may enclose driving assemblies in a sealed environment configured to isolate at least a portion of the driving assemblies from the outside environment, and methods of operation thereof. Drive assemblies that may be enclosed in the sealed environment of the vacuum robot linkage may be infinite rotation driving assemblies that enable a robot link member to have a rotation of at least 360 degrees about an axis. The vacuum robot linkage environment may be sealed through a magnetic liquid rotary seal and/or through a fixed vacuum seal.