Applied Materials, Inc.
3D DRAM STRUCTURE WITH HIGH MOBILITY CHANNEL
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Abstract:
Memory devices are described. The memory devices include a plurality of bit lines extending through a stack of alternating memory layers and dielectric layers. Each of the memory layers comprises a single crystalline-like silicon layer and includes a first word line, a second word line, a first capacitor, and a second capacitor. Methods of forming stacked memory devices are also described.
Status:
Application
Type:
Utility
Filling date:
15 Dec 2021
Issue date:
7 Apr 2022