Applied Materials, Inc.
Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use

Abstract:

Metal coordination complexes comprising at least one diazabutadiene based ligand having a structure represented by: ##STR00001## where R.sub.1 and R.sub.4 are selected from the group consisting of C4-C10 alkyl groups; and R.sub.2 and R.sub.3 are each independently selected from the group consisting of H, C1-C6 alkyl, cycloalkyl, or aryl groups and the difference in the number of carbons in R.sub.2 and R.sub.3 is greater than or equal to 2. Processing methods using the metal coordination complexes are also described.