Applied Materials, Inc.
CRESTED BARRIER DEVICE ENHANCED WITH INTERFACE SWITCHING MODULATION

Abstract:

A crested barrier device with interface switching modulation layers may include a first electrode, a first tunneling layer comprising a first dielectric constant, such as cobalt oxide, and one or more interface switching modulation (ISM) layers. Each of the one or more ISM layers may include a layer of hafnium oxide, a layer of silicon oxide comprising a second dielectric constant that is at least 1.5 times larger than the first dielectric constant, and a monolayer of titanium oxide between the layer of hafnium oxide and the layer of silicon oxide. The device may also include a second tunneling layer and a second electrode.