Applied Materials, Inc.
OPTICAL DEVICE HAVING STRUCTURAL AND REFRACTIVE INDEX GRADATION, AND METHOD OF FABRICATING THE SAME

Abstract:

The present disclosure generally relates to a method and apparatus for forming a substrate having a graduated refractive index. A method of forming a waveguide structure includes expelling plasma from an applicator having a head toward a plurality of grating structures formed on a substrate. The plasma is formed in the head at atmospheric pressure. The method further includes changing a depth of the plurality of grating structures with the plasma by removing grating material from the plurality of grating structures.