Applied Materials, Inc.
Method and mechanism for symmetrically controlling pressure in process chamber

Abstract:

Disclosed herein are embodiments of a value assembly, methods of manufacturing the same, and methods of using the same. In one embodiment, a sensor assembly comprises a housing having a through-bore, a first flap coupled to a first shaft and a second flap coupled to a second shaft, wherein the first shaft and the second shaft are coupled within the housing; and one or more gear assemblies coupled to the first shaft and the second shaft, wherein the gear assemblies are configured to rotate the first flap and the second flap from a first position to a second position to prevent a flow from traversing through the through-bore, and from the second position to the first position to allow the flow to traverse through the through-bore.