Applied Materials, Inc.
Quartz crystal microbalance concentration monitor

Abstract:

Describe is a quartz crystal microbalance (QCM) device mounted within a heated sample chamber. The sample chamber temperature is maintained about 10.degree. C. to about 30.degree. C. greater than the temperature of the precursor vessel. The sample chamber is connected to the precursor delivery line and includes a high temperature valve and a flow pathway to foreline with a high temperature valve to permit removal of excess material. The QCM device includes a heater and gas cooling channel allowing the device to be maintained at a temperature about 10.degree. C. to about 30.degree. C. less than the temperature of the precursor vessel.