Applied Materials, Inc.
Surface roughness for flowable CVD film
Last updated:
Abstract:
Methods for forming a smooth ultra-thin flowable CVD film by using a surface treatment on a substrate surface before flowable CVD film deposition improves the uniformity and overall film smoothness. The flowable CVD film can be cured by any suitable curing process to form a smooth flowable CVD film.
Status:
Grant
Type:
Utility
Filling date:
15 Jul 2020
Issue date:
21 Jun 2022