Applied Materials, Inc.
EROSION RESISTANT METAL FLUORIDE COATINGS, METHODS OF PREPARATION AND METHODS OF USE THEREOF

Abstract:

Embodiments of the disclosure relate to articles, coated chamber components, methods of coating chamber components and systems with a metal fluoride coating that includes at least one metal fluoride having a formula of M1.sub.xF.sub.w, M1.sub.xM2.sub.yF.sub.w or M1.sub.xM2.sub.yM3.sub.zF.sub.w, where at least one of M1, M2, or M3 is nickel. The metal fluoride coating can be formed directly on a substrate or on a coating of a substrate.