Applied Materials, Inc.
CFX LAYER TO PROTECT ALUMINUM SURFACE FROM OVER-OXIDATION

Abstract:

In one example, a method includes flowing a carbon-containing gas into a processing volume of a process chamber, the process chamber having internal surfaces comprising aluminum, and depositing a carbon film on the internal surfaces of the process chamber. The method also includes flowing fluorine radicals into the process chamber, and fluorinating the carbon film to create a CF.sub.x layer on the internal surfaces. The method also includes oxidizing the CF.sub.x layer on the internal surfaces creating an AlOCF.sub.x layer on the internal surfaces.