Applied Materials, Inc.
NOVEL AND EFFECTIVE HOMOGENIZE FLOW MIXING DESIGN

Abstract:

Provided herein is a gas source comprising a flow conduit having an interior volume and an open end, a remote plasma source fluidly coupled to the flow conduit, a secondary gas source extending inwardly of the interior volume of the flow conduit, the secondary gas source including at least one gas port therein positioned to flow a secondary gas inwardly of the interior volume of the flow conduit.