Applied Materials, Inc.
Methods for improved polymer-copper adhesion
Last updated:
Abstract:
Methods for forming circuit boards and circuit boards using an adhesion layer are described. A substrate with two surfaces is exposed to a bifunctional organic compound to form an adhesion layer on the first substrate surface. A resin layer is then deposited on the adhesion layer and the exposed substrate surfaces. Portions of the resin layer may be removed to expose metal pads for contacts.
Status:
Grant
Type:
Utility
Filling date:
28 Aug 2020
Issue date:
12 Jul 2022