Applied Materials, Inc.
MOISTURE BARRIER FILM HAVING LOW REFRACTION INDEX AND LOW WATER VAPOR TRAMISSION RATE

Abstract:

Embodiments of the present disclosure generally relate to an organic light emitting diode device, and more particularly, to moisture barrier films utilized in an OLED device. The OLED device comprises a thin film encapsulation structure and/or a thin film transistor. A moisture barrier film is used as a first barrier layer in the thin film encapsulation structure and as a passivation layer and/or a gate insulating layer in the thin film transistor. The moisture barrier film comprises a silicon oxynitride material having a low refractive index of less than about 1.5, a low water vapor transmission rate of less than about 5.0.times.10.sup.-5 g/m.sup.2/day, and low hydrogen content of less than about 8%.