Applied Materials, Inc.
RECIPE OPTIMIZATION THROUGH MACHINE LEARNING

Abstract:

A method includes training a machine learning model with data input including one or more sets of historical recipe parameters associated with producing one or more substrates with substrate processing equipment and target data including historical performance data of the one or more substrates to generate a trained machine learning model. The method further includes identifying one or more sets of additional recipe parameters associated with a level of uncertainty of the trained machine learning model. The method further includes further training the machine learning model with additional data input including the one or more sets of additional recipe parameters and additional target data including additional performance data of one or more additional substrates produced based on the one or more sets of additional recipe parameters to update the trained machine learning model.