Applied Materials, Inc.
CHAMBER COMPONENT WITH PROTECTIVE CERAMIC COATING CONTAINING YTTRIUM, ALUMINUM AND OXYGEN
Last updated:
Abstract:
A coated chamber component comprises a body and a protective ceramic coating deposited over a surface of the body, the protective ceramic coating being amorphous and comprising about 8-20% by weight yttrium, about 20-32% by weight aluminum, and about 60-70% by weight oxygen.
Status:
Application
Type:
Utility
Filling date:
25 Apr 2022
Issue date:
11 Aug 2022