Applied Materials, Inc.
SUBSTRATE PROCESSING SYSTEM FOR PROCESSING OF A PLURALITY OF SUBSTRATES AND METHOD OF PROCESSING A SUBSTRATE IN AN IN-LINE SUBSTRATE PROCESSING SYSTEM

Abstract:

A substrate processing system for processing of a plurality of substrates is described. The system includes a first deposition module being a first in-line module and having a first plurality of vacuum deposition sources; a second deposition module being a second in-line module and having a second plurality of vacuum deposition sources; and a glass handling module between the first deposition module and the second deposition module.