Applied Materials, Inc.
METHOD FOR AMORPHOUS, HIGH-REFRACTIVE-INDEX ENCAPSULATION OF NANOPARTICLE IMPRINT FILMS FOR OPTICAL DEVICES

Abstract:

Embodiments provided herein provide for amorphous encapsulation of nanoparticle imprint films for optical devices. In one embodiment provided herein, a device is provided. The device includes a plurality of optical device structures disposed on a surface of a substrate. The plurality of optical device structures include a nanoparticle imprint material. The plurality of optical device structures further include an encapsulation layer disposed over at least a top surface and one sidewall of each optical device structure of the plurality of optical device structures. The encapsulation layer is amorphous or substantially amorphous. The encapsulation layer includes a niobium oxide. The niobium oxide is selected from the group consisting of niobium monoxide (NbO), niobium dioxide (NbO.sub.2), niobium pentoxide (Nb.sub.2O.sub.5), Nb.sub.12O.sub.29, Nb.sub.47O.sub.116, or Nb3n.sub.+1O.sub.8n-2, where n is 5 to 8.