Applied Materials, Inc.
HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER FOR SUPPORTING A SUBSTRATE, VACUUM PROCESSING SYSTEM, METHOD FOR HOLDING A SUBSTRATE, AND METHOD FOR RELEASING A SUBSTRATE

Abstract:

The present disclosure provides a holding arrangement. The holding arrangement for holding a substrate includes: a body portion having a first side; a dry adhesive material provided on the first side of the body portion; a seal surrounding the dry adhesive material and configured to provide a vacuum region on the first side, wherein the dry adhesive material is provided in the vacuum region; and a conduit to evacuate the vacuum region.