Applied Materials, Inc.
Rare-earth oxide based coatings based on ion assisted deposition

Abstract:

A component for a processing chamber includes a ceramic body having at least one surface with a first average surface roughness. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 .mu.m over the at least one surface and having a second average surface roughness that is less than the first average surface roughness.