Applied Materials, Inc.
ADDRESSABLE PLASMA DELIVERY METHODS AND DEVICES

Abstract:

Devices, assemblies, and system including a plasma delivery device comprising a memory element that stores a first state or a second state. The memory element is configured to receive a first signal that causes the memory element to change between the first state and the second state. The plasma delivery device further includes a switch coupled to the memory element. The switch is configured to change between an open configuration and a closed configuration. The plasma delivery device further comprises a plasma emitter coupled to the switch. The plasma emitter is configured to be selectively activated and deactivated. The plasma emitter supplies plasma related fluxes to an environment proximate the plasma delivery device responsive to being activated. The plasma emitter is configured to receive a second signal that activates the plasma emitter based on the open configuration or the closed configuration of the switch.