Applied Materials, Inc.
OPTICAL DEVICE FILM WITH TUNABLE REFRACTIVE INDEX

Abstract:

An optical device is provided. The optical device includes an optical device substrate having a first surface; and a plurality of optical device structures disposed over the first surface of the optical device substrate, the plurality of optical device structures spaced apart from each other in a direction parallel to the first surface, and each optical device structure of the plurality of optical device structures including an optical device film. The optical device film of each optical device structure includes a first zone and a second zone, the first zone positioned between the optical device substrate and the second zone, wherein the first zone and the second zone each include one or more of oxygen and nitrogen, and the first zone and the second zone collectively include three or more metal, metalloid, or semiconductor elements.