Applied Materials, Inc.
Apparatus For Fiber Optic Temperature Probe In Processing Chambers

Last updated:

Abstract:

Apparatus and systems for temperature probe integration on pedestal heaters of a processing chamber including a cooling assembly for cooling temperature probes disposed within. Cooling assemblies can be actively water-cooled, passively cooled by fin stacks. Further cooling assemblies include a mechanical arm assembly for lowering or raising the temperature probes.

Status:
Application
Type:

Utility

Filling date:

2 Mar 2022

Issue date:

8 Sep 2022