Applied Materials, Inc.
Apparatus For Fiber Optic Temperature Probe In Processing Chambers
Last updated:
Abstract:
Apparatus and systems for temperature probe integration on pedestal heaters of a processing chamber including a cooling assembly for cooling temperature probes disposed within. Cooling assemblies can be actively water-cooled, passively cooled by fin stacks. Further cooling assemblies include a mechanical arm assembly for lowering or raising the temperature probes.
Status:
Application
Type:
Utility
Filling date:
2 Mar 2022
Issue date:
8 Sep 2022