Applied Materials, Inc.
SYSTEMS AND METHODS FOR PROCESS CHAMBER HEALTH MONITORING AND DIAGNOSTICS USING VIRTUAL MODEL

Abstract:

A method includes obtaining, by a processor, a plurality of sensor values associated with a deposition process performed, according to a recipe, in a process chamber to deposit film on a surface of a substrate. The method further includes applying a machine-learning model to the plurality of sensor values, the machine-learning model trained based on historical sensor data of a sub-system of the process chamber and task data associated with the recipe for depositing the fil. The method further includes generating an output of the machine-learning model, wherein the output is indicative of a health of the sub-system.