Applied Materials, Inc.
POLISHING CARRIER HEAD WITH FLOATING EDGE CONTROL

Abstract:

A carrier head for holding a substrate in a polishing system includes a housing, an annular body that is vertically movable relative to the housing by an actuator, a first annular membrane secured to extending below the annular body to form at least one lower pressurizable chamber between the first annular membrane and the annular body, and at least one pressure supply line connected to the at least one lower pressurizable chamber. The annular body includes an upper portion and at least one lower post projecting downward from the upper portion, with the at least one lower post located inside the at least one lower pressurizable chamber.