Applied Materials, Inc.
Selective aluminum oxide film deposition

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Abstract:

Methods of depositing films are described. Specifically, methods of depositing metal oxide films are described. A metal oxide film is selectively deposited on a metal layer relative to a dielectric layer by exposing a substrate to an organometallic precursor followed by exposure to an oxidant.

Status:
Grant
Type:

Utility

Filling date:

14 Sep 2018

Issue date:

20 Sep 2022