Applied Materials, Inc.
Selective aluminum oxide film deposition
Last updated:
Abstract:
Methods of depositing films are described. Specifically, methods of depositing metal oxide films are described. A metal oxide film is selectively deposited on a metal layer relative to a dielectric layer by exposing a substrate to an organometallic precursor followed by exposure to an oxidant.
Status:
Grant
Type:
Utility
Filling date:
14 Sep 2018
Issue date:
20 Sep 2022