Applied Materials, Inc.
High temperature chemical vapor deposition lid
Last updated:
Abstract:
Process chamber lids, processing chambers and methods using the lids are described. The lid includes a pumping liner with a showerhead, blocker plate and gas funnel positioned therein. A liner heater is positioned on the pumping liner to control temperature in the pumping liner. Gas is flowed into the gas funnel using a dead-volume free one-way valve with a remote plasma source.
Status:
Grant
Type:
Utility
Filling date:
17 Jun 2021
Issue date:
20 Sep 2022