Applied Materials, Inc.
High temperature chemical vapor deposition lid

Last updated:

Abstract:

Process chamber lids, processing chambers and methods using the lids are described. The lid includes a pumping liner with a showerhead, blocker plate and gas funnel positioned therein. A liner heater is positioned on the pumping liner to control temperature in the pumping liner. Gas is flowed into the gas funnel using a dead-volume free one-way valve with a remote plasma source.

Status:
Grant
Type:

Utility

Filling date:

17 Jun 2021

Issue date:

20 Sep 2022