Applied Materials, Inc.
Steam treatment stations for chemical mechanical polishing system
Last updated:
Abstract:
An apparatus for steam treatment of a carrier head or a substrate in a chemical mechanical polishing system includes a load cup, a pedestal in a cavity defined by the load cup, the pedestal configured to receive a substrate from or supply a substrate to a carrier head, a boiler to generate steam, one or more nozzles positioned to direct steam inwardly into the cavity defined by the load cup, and a supply line running from the boiler to the one or more nozzles to supply steam to the one or more nozzles.
Status:
Grant
Type:
Utility
Filling date:
28 May 2020
Issue date:
20 Sep 2022