Applied Materials, Inc.
Plasma erosion resistant rare-earth oxide based thin film coatings

Abstract:

An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y.sub.3Al.sub.5O.sub.12, Er.sub.2O.sub.3, Er.sub.3Al.sub.5O.sub.12, and a ceramic compound comprising Y.sub.4Al.sub.2O.sub.9 and a solid-solution of Y.sub.2O.sub.3--ZrO.sub.2.