Applied Materials, Inc.
Methods and apparatus for fabrication of self aligning interconnect structure

Abstract:

Methods and apparatus for forming an interconnect structure, including: depositing a plurality of spacers atop a low-k dielectric layer including a plurality of recessed vias, wherein one or more of the plurality of spacers is deposited atop the top surface of the low-k dielectric layer and within one or more of the plurality of recessed vias to form a one or more partially filled recessed vias; depositing a conformal metal layer atop the low-k dielectric layer, plurality of spacers, and within the one or more partially filled recessed vias to form a plurality of filled vias; etching the conformal metal layer to remove portions thereof to form a second plurality of partially filled recessed vias; and filling between the plurality spacers and within the second plurality of partially filled recessed vias with a dielectric material to form a second plurality of filled vias.