Applied Materials, Inc.
Y.sub.2O.sub.3--ZrO.sub.2 erosion resistant material for chamber components in plasma environments

Abstract:

A chamber component for a processing chamber comprises a ceramic body consisting of a sintered ceramic material consisting essentially of one or more phase of Y.sub.2O.sub.3--ZrO.sub.2. The ceramic material consists essentially of 55-65 mol % Y.sub.2O.sub.3 and 35-45 mol % ZrO.sub.2.