Applied Materials, Inc.
Multi-layer coating with diffusion barrier layer and erosion resistant layer

Abstract:

A multi-layer coating for a surface of an article comprises a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiN.sub.x, TaN.sub.x, Zr.sub.3N.sub.4, and TiZr.sub.xN.sub.y. The erosion resistant layer may be a rare oxide film comprising YZr.sub.xO.sub.y. The diffusion barrier layer and the erosion resistant layer may be deposited on the article's surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.