Applied Materials, Inc.
Multi-zone gasket for substrate support assembly

Abstract:

A gasket for a substrate support assembly may have a top surface having a surface area and a plurality of zones that together define the surface area of the top surface. The plurality of zones may comprise at least a) a first zone comprising a first stack of gasket layers, the first zone having a first average thermal conductivity in a first direction, and b) a second zone comprising one or more gasket layers, the second zone having a second average thermal conductivity in the first direction.