Applied Materials, Inc.
Digital sampling to control resonator frequency and phase in a LINAC

Abstract:

A system for measuring and controlling the phase of an incoming analog waveform is disclosed. The system comprises an analog to digital converter to convert the incoming analog waveform to a digital representation. The system also includes a clock delay generator, which allows a programmable amount of delay to be introduced into the sample clock for the ADC. The system further comprises a controller to manipulate the delay used by the clock delay generator and store the outputs from the ADC. The controller can then use the digitized representation to determine the frequency of the incoming analog waveform, its phase drift and its phase relative to a master clock. The controller can then modify the output of a RF generator in response to these determinations.