Applied Materials, Inc.
Rare-earth oxide based chamber material

Abstract:

An article comprises a plasma resistant ceramic material comprising Y.sub.2O.sub.3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er.sub.2O.sub.3 at a concentration of above 30 molar % to approximately 60 molar %, and at least one of ZrO.sub.2, Gd.sub.2O.sub.3 or SiO.sub.2 at a concentration of over 0 molar % to approximately 30 molar %.