Applied Materials, Inc.
SHADOW MASK WITH PLASMA RESISTANT COATING

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Abstract:

A mask assembly (100) includes a mask frame (102) and a mask screen (104), both of the mask frame (102) and the mask screen (104) made of a metallic material, and a metal coating (125) disposed on exposed surfaces of one or both of the mask frame (102) and the mask screen (104).

Status:
Grant
Type:

Utility

Filling date:

24 May 2016

Issue date:

22 Jul 2021