Applied Materials, Inc.
V-shape seal band for a semiconductor processing chamber

Abstract:

Implementations described herein provide a substrate support assembly that includes a seal band. The seal band has a ring shaped body. The ring shaped body has an inner surface, a top surface, and a bottom surface. Each of the top surface and the bottom surface extend from the inner surface at a first angle of more than 110.degree. from the inner surface. The seal band also has an outer surface that has an indent formed therein. The outer surface connects the top surface to the bottom surface. A second angle is formed between an imaginary line normal to the inner surface and the bottom surface. The second angle is between about 10.degree. and about 30.degree.. The ring shaped body has a cross-sectional profile forming a V-shape.