Applied Materials, Inc.
COPPER, INDIUM, GALLIUM, SELENIUM (CIGS) FILMS WITH IMPROVED QUANTUM EFFICIENCY

Abstract:

Embodiments of the present disclosure relate to photovoltaic devices, CIGS containing films, and methods of manufacturing CIGS containing films and photovoltaic devices to improve quantum efficiency, reduce interface charges, electron losses, and electron re-combinations. The CIGS layers in the photovoltaic devices described herein may be deposited using physical vapor deposition, followed by in-situ oxygen annealing, and further followed by deposition of a cap layer over the CIGS layer without subjecting the CIGS layer to an air break.