Applied Materials, Inc.
HORIZONTAL GAA NANO-WIRE AND NANO-SLAB TRANSISTORS
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Abstract:
Horizontal gate-all-around devices and methods of manufacturing same are described. The hGAA devices comprise a doped semiconductor material between source regions and drain regions of the device. The method includes doping semiconductor material layers between source regions and drain regions of an electronic device.
Status:
Grant
Type:
Utility
Filling date:
19 Oct 2020
Issue date:
22 Apr 2021