Applied Materials, Inc.
ROLLER DEVICE FOR GUIDING A FLEXIBLE SUBSTRATE, USE OF A ROLLER DEVICE FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APPARATUS, AND METHOD OF PROCESSING A FLEXIBLE SUBSTRATE

Abstract:

A roller device for guiding a flexible substrate is described. The roller device includes a support surface for contacting the flexible substrate, the support surface having a coating comprising an electronegative polymer. Further, a vacuum processing apparatus for processing a flexible substrate including the roller device and a method of processing a flexible substrate in the vacuum processing apparatus is described.