Applied Materials, Inc.
CHARACTERIZING AND MONITORING ELECTRICAL COMPONENTS OF MANUFACTURING EQUIPMENT

Abstract:

A method includes receiving, from one or more sensors associated with manufacturing equipment, current trace data associated with producing, by the manufacturing equipment, a plurality of products. The method further includes performing signal processing to break down the current trace data into a plurality of sets of current component data mapped to corresponding component identifiers. The method further includes providing the plurality of sets of current component data and the corresponding component identifiers as input to a trained machine learning model. The method further includes obtaining, from the trained machine learning model, one or more outputs indicative of predictive data and causing, based on the predictive data, performance of one or more corrective actions associated with the manufacturing equipment.