Applied Materials, Inc.
CONVEYOR INSPECTION SYSTEM, SUBSTRATE ROTATOR, AND TEST SYSTEM HAVING THE SAME

Abstract:

Embodiments disclosed herein include a substrate rotator, a substrate edge metrology system, and a method of performing metrology on a substrate. The substrate rotator includes a body, a body actuator coupled to the body and configured to rotate the body, and a first and second gripper coupled to the body. The substrate rotator is configured to rotate one or more substrates. The substrate edge metrology system includes two metrology systems and the substrate rotator. The substrate edge metrology system measures side chips or other defects on all sides of the substrate. The method includes performing metrology on a first set of sides of the first substrate, rotating the first substrate by a first angle, and performing metrology on the second set of sides of the first substrate. The method allows for measuring side chips or other defects on all sides of the substrate.