Advanced Micro Devices, Inc.
FUSES TO MEASURE ELECTROSTATIC DISCHARGE DURING DIE TO SUBSTRATE OR PACKAGE ASSEMBLY

Abstract:

A system and method for detecting and measuring electrostatic discharge during semiconductor assembly are described. A semiconductor device fabrication process forms a conductor between two metal routes in a series path on a semiconductor die. The series path is between a bump on the die and a substrate tie. The two metal routes have a width greater than a threshold based on a metal width capable of conducting a critical current density caused by an electrostatic discharge event without conductive failure or breakdown. The conductor has a width less than the threshold. When an electrostatic discharge event occurs, if the current exceeds a critical amount of current, the conductor experiences conductive breakdown and current ceases to flow. During later testing, this series path is tested for open connections, which indicate whether the conductor acting as an electrical on-die fuse experienced conductive failure during assembly of a semiconductor chip.