Advanced Micro Devices, Inc.
Probe placement for laser probing system

Abstract:

A control system for placing an optic probe includes a receiver circuit that receives reflected light produced from the optic probe and provides a laser probe (LP) waveform of the reflected light in response to an activation of a trigger signal. A combinational logic analysis (CLA) processor provides a CLA waveform in response to simulating an optical response at a target location on a surface of a cell of a device under test to a test pattern. A test controller receives the CLA waveform and the LP waveform, and has a first output for providing the trigger signal, a second output for providing the test pattern, and a third output for providing a position signal. The test controller updates the position signal to move the optic probe closer to the target location according to a degree of fit between the LP waveform and the CLA waveform.