Advanced Micro Devices, Inc.
Control system and architecture for incorporating microelectromechanical (MEM) switches in fluid-based cooling of 3D integrated circuits

Abstract:

A cooling system is provided for a 3D integrated circuit (IC) to deliver fluid in x, y, and z dimensions to interior regions of the IC as a means to regulate heat. An IC includes a microfluidic network of channels, at least one sensor and at least one microelectromechanical system (MEMS)-based device that is disposed within the network of channels and that is configured to regulate a flow of fluid within the network of channels. Each sensor monitors a state of the IC. Each MEMS-based device receives control signals based on a state of the IC and regulates a flow of fluid within the network of channels based on control signals that area received on a real-time basis based on changes detected in a state of the IC.