ANSYS, Inc.
Methods and systems for numerical prediction and correction of processes using sensor data

Abstract:

Methods and systems are disclosed for simulating a fabrication process based on real time sensor measurements obtained during the process. In one embodiment, a first simulation of the process computes a set of predicted physical responses based on a first set of assumed boundary conditions, and then, during the fabrication process sensor measurements are obtained and used to compute a second set of boundary conditions. A second simulation, based on the second set of boundary conditions, can then be performed to compute an updated set of predicted physical responses that can be compared to the previously computed set of physical responses. The difference(s) can be used to determine line, surface or volumetric response distribution from point, line or surface boundary conditions respectively, whether and how to modify the fabrication process (or other processes) and how to take additive and other manufacturing process decisions real-time using simulation. Other examples are also described.