Air Products and Chemicals, Inc.
Separation process and apparatus for light noble gas

Abstract:

Process and apparatus for producing helium, neon, or argon product gas using an adsorption separation unit having minimal dead end volumes. A purification unit receives a stream enriched in helium, neon, or argon, and a stream is recycled from the purification unit back to the adsorption separation unit in a controlled manner to maintain the concentration of the helium, neon, or argon in the feed to the separation unit within a targeted range.