ASML Holding N.V.
Hollow-core photonic crystal fiber based optical component for broadband radiation generation

Abstract:

Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm.sup.3 per cm of length of said hollow-core photonic crystal fiber.