ASML Holding N.V.
Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus

Abstract:

A table for a lithographic apparatus, the table having an encoder plate located on the table, a gap between the encoder plate and a top surface of the table, the gap located radially inward of the encoder plate relative to the periphery of the table, and a fluid extraction system with an opening in the surface of the gap to extract liquid from the gap.