ASML Holding N.V.
Method of determining a set of metrology points on a substrate, associated apparatus and computer program

Abstract:

A method of determining a set of metrology point locations, the set including a subset of potential metrology point locations on a substrate, the method including: determining a relation between noise distributions associated with a plurality of the potential metrology point locations using existing knowledge; and using the determined relation and a model associated with the substrate to determine the set.